Ersyzario Edo Yunata, Evi Suaebah, Rizal Arifin
In this study, the experiment and molecular dynamic simulations were used to show how oxygen plasma etching works on diamond-like carbon (DLC) for micro-texturing. On the experimental side, C–C bonds on the DLC were dissociated by the irradiated oxygen. The physical bombardment of reactive oxygen ions selectively removes the carbon atoms in the unmasked area via the generation and desorption of gaseous carbon monoxide and carbon dioxide molecules. Molecular dynamic simulation exhibits the reactivity of O2 molecules with C atoms in the DLC. The quantity of O2 molecules and the formation of new molecules (CO) were proven in this simulation. Graphical abstract: (Figure presented.) © The Author(s), under exclusive licence to The Materials Research Society 2024.
Department of Physics, Airlangga University, East Java, Surabaya, Indonesia; Department of Physics, Universitas Negeri Surabaya, East Java, Surabaya, Indonesia; Department of Mechanical Engineering, Universitas Muhammadiyah Ponorogo, East Java, Ponorogo, Indonesia
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